High-speed Electro-optic Modulation in Silicon Nitride
2023 Conference on Lasers and Electro-Optics (CLEO)(2023)
摘要
We demonstrate electro-optic modulation up to 15GHz (3dB bandwidth) in a silicon nitride ring resonator by electrically poling the silicon nitride at a high temperature to engineer an electro-optic effect.
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关键词
electro-optic effect,electro-optic modulation up to 15GHz,frequency 15.0 GHz,high-speed electro-optic modulation,noise figure 3.0 dB,silicon nitride ring resonator
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