First Fire-free, Low-voltage (~1.2 V), and Low Off-current (~3 nA) SiOxTey Selectors

Operating voltage compatibility and low power consumption are crucial for on-chip integration of high-density one-selector-one-resistor (1S/1R) arrays. However, traditional chalcogenide-based threshold selectors require a one-time first fire operation with voltage higher than the threshold voltage. Here, we introduce a novel SiOTe selector based on a stable silicon oxide matrix, with tunable first fire voltage and ultimately first fire-free characteristics. These selectors achieve low threshold voltages (V th = 1.1 V – 1.5 V) and low off-current (I off ~ 3 nA at 0.5 V for V th = 1.2 V). SiOTe selectors show promising thermal stability (300 °C, 30 min in air) and endurance of >10 ⁸ cycles.