Compact Photonic Crystal Nanobeam Cavity on Si3 N4 Loaded LNOI Platform
2023 Opto-Electronics and Communications Conference (OECC)(2023)
摘要
In this paper, we design and experimentally demonstrate a photonic crystal nanobeam cavity device based on the Si
3
N
4
loaded LNOI platform with a mode volume of 3.06 $\mu \mathrm{m}^{3}$, which is potential in achieving low power devices. The device shows an insertion loss of 0.89 dB, and a 3-dB bandwidth of 0.284 nm.
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关键词
LNOI,photonic crystal nanobeam
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