On the Noise Contribution of Dielectric Interfaces in Biochemical CMOS Sensor Chips

Mathias Schulz,Stefan Keil,Simon Löhlein, Sourish Banerjee,Nicolai Simon, Catherine Dubourdieu,Volker Bucher,Roland Thewes

ESSCIRC 2023- IEEE 49th European Solid State Circuits Conference (ESSCIRC)（2023）

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摘要

Low-frequency noise is investigated of CMOS devices equipped with a dielectric sensor interface to an electrolyte. A related test methodology is suggested to characterize the sensor dielectric’s noise, and a model is derived to describe the dielectric’s contribution to the total noise.

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关键词

1/f noise,flicker noise,ISFET,EOSFET,sensor dielectric,electrolyte,CMOS

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