Trimethylplatinum(IV) Complexes for MOCVD Applications: A Physicochemical Study

The structure of trimethylplatinum(IV) iodide [(CH 3 ) 3 PtI] 4 ( I ) (CIF file CCDC no. 22330007) is refined. The structure of the synthesized for the first time trimethylplatinum(IV) complex with tridentate N , N , O -iminoketonate [(CH 3 ) 3 Pt(C 9 H 17 N 2 O)] ( II ) is determined by X-ray diffraction (XRD) (CIF file CCDC no. 22330008). The purity of the isolated phases is confirmed by elemental analysis and IR and NMR spectroscopy. The thermal behavior of complex II is studied by thermogravimetry. The energies of ionization and fragmentation of the molecules of complex II leading to the formation of the most stable fragment [(CH 3 ) 3 Pt] + are estimated by quantum-chemical calculations. Complex II is tested in the MOCVD processes. The Pt films with the pronounced (111) texture and particle sizes about 100 nm are prepared on Si plates in the presence of oxygen.