Driving up the quality of metal organic chemical vapor deposition-grown epitaxial wafers for highly innovative photonic applications

•Production of extended photodetectors (ex-PD) in a multi-wafer chamber.•Production of quantum cascade lasers (QCL) in a multi-wafer chamber.•Obtaining high crystallographic quality and repeatability of the epi‑layers.•Ex-PDs with low dark current density (1 × 10–4 A/cm2 at -100 mV/room temperature).