Depth-profiling analysis of ZnO layers with three morphologies by direct-current glow discharge mass spectrometry

Lei Huang,Wang Zeng,Rong Qian,Shangjun Zhuo, Zheming Gu,Anqi Liu,Jie Gao,Qiao Chen

Microchemical Journal（2023）

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摘要

The potential applicability of direct-current glow discharge mass spectrometry (dc-GD-MS) was explored for depth-profiling analysis of zinc oxide (ZnO) layers on steel substrates.

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关键词

Glow discharge mass spectrometry,Depth-profiling analysis,ZnO layer,Morphology,Thickness,Depth resolution

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