Fatigue Mechanism of Antiferroelectric Hf_0.1Zr_0.9O₂ Toward Endurance Immunity by Opposite Polarity Cycling Recovery (OPCR) for eDRAM

Opposite polarity cycling recovery (OPCR) is proposed to completely restore a fatigued antiferroelectric (AFE) capacitor back to its initial state, thereby extending the endurance number of switching cycles for AFE-RAM. A comprehensive model exclusive to AFE with unipolar cycling is revealed to achieve unlimited endurance, and the unipolar cycling with OPCR is experimentally demonstrated to accumulate 1012 cycles, while achieving the nondegradation and complete restoration of the remnant polarization (P-r). Furthermore, the proposed OPCR achieves a recovery time ratio of 0% (trecovery/tperiod), which indicates no extra time to spend for the recovery procedure.