Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process

This paper reports a novel dry-transfer method for suspending and patterning two-dimensional (2D) materials across closed (sealed) cavities on a target substrate. The process utilizes handling frames and heat to ensure sufficient adhesion and a multi-layer resist stack to pattern the suspended thin films. The yield of intact suspended monolayer graphene membranes is up to more than 75 %, higher than formerly reported [1]-[3]. The process also demonstrates high yields of intact membranes of double-layer graphene and of two different transition metal dichalcogenides. The process flow can be applied to the fabrication of various sensor applications, such as pressure sensors.