A high-sensitivity, quantitative method to detect micro-scale optics' internal defects and impurity

This paper discusses a high sensitivity quantitative method to efficiently detect the defect existence and allocate the impurity down to single micron level. This methodology by nature only enhances the defects within the signal path no matter on the optics surface, in the coating or inside the glass material, which fundamentally helps on high contrast optics like the AR/VR metrology lens which mimics human eye's sensitivity, or deep space observation optics or biology imaging system.