On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detectorHong Cai, Md Hazwani Khairy, Rachel Ang,Linfang Xu,Doris Ng,Nanxi Li,Zhonghua Gu, Anmin Kong,Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching,Norhanani Jaafar,Huanhuan Wang,Landobasa Y.M. Tobing, Leh Woon Lim,Qingxin Zhang,Lennon Yao Ting LeeSilicon Photonics XVIII(2023)引用 0|浏览11暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要