Low-power contactless button system based on MEMS ScAlN pyroelectric detectorLinfang Xu,Doris K. T. Ng,Weiguo Chen,Nanxi Li,Chong Pei Ho,Duan Jian Goh, Yao Zhang,Qingxin Zhang, Lennon Y. T. LeeMOEMS and Miniaturized Systems XXII(2023)引用 0|浏览2暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要