Study of epsilon-near-zero response in Al substituted titanium oxynitride thin films using computational and experimental investigations

Materials Science and Engineering: B(2023)

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摘要
•DFT calculations of Al substituted titanium oxynitride compositions.•Phase pure growth of thin films.•Band gap of Tatania reduced with the increment of dopant contents.•A significant variation was observed in thermoelectric and optical properties.•Epsilon near zero response was achieved in highly doped composition.
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关键词
Titanium oxynitride,DFT,Thin films,Optical properties,Epsilon-near-zero
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