Control of evaporation property and film structure of Te by alloying

•A new evaporation source of Te alloy is instead of traditional pure Te source.•Te atom has a different evaporation way in Bi-Te, In-Te and Pd-Te alloy.•The evaporation rate is controlled by alloying.•Evaporation rate follows the saturation vapor pressure distribution of element.•The grain size of Te film from In-Te alloy is smallest, and more continuous.