Anodic HfO2 crossbar arrays for hydroxide-based memristive sensing in liquids

Journal of Electrochemical Science and Engineering(2023)

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摘要
The development of miniaturized and portable sensing devices is crucial to meeting the high processing capacity demands of contemporary computing systems. Hence, the conceptualization of memristive sensors for hydroxide-containing liquids is proposed in this study. Metal-insulator-metal (MIM) structures were formed on electrochemically anodized Hf thin films with Pt patterned as top electrodes. These MIM memristive structures were integrated into a crossbar array, allowing the investigation of a high number of potential memristor sensors. The MIM structures have demonstrated sensing possibilities in the detection of the hydroxyl ion in D-glucose, used as a standard solution. The sensing method was based on the resistive state ratio extracted from I-U sweeps measurements. Analytical characterization of the memristor sensor was done based on the resistive state ratio in relation to different concentrations of a standard solution drop cast directly on the surface of the device. Linearity was found for D-glucose concentrations ranging from 10 mM to 80 mM with a reasonable corresponding correlation factor (R2=0.96809). Additionally, D-glucose incorporation in anodic oxide was studied by XPS to investigate its effect on conductive filaments formation. A carbon bonded by a single covalent bond to oxygen (O-C-O) was detected, confirming the proposed sensing mechanism defined by the glucose penetrating the oxide/electrode interface.
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关键词
Memristors,anodic oxides,ultra-thin films,liquid detection,valve metals
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