Special Issue "Building Three-Dimensional Integrated Circuits and Microsystems"

Zhiyuan Zhu,Sixiang Zhang,Shenglin Ma,Ziyu Liu

Processes（2023）

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摘要

With the further innovation of chip technology, semiconductor integrated circuits have made irreplaceable contributions to the development of microelectronic systems [...]

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关键词

microsystems”,circuits,building,three-dimensional

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