Increased fatigue resistance in transparent lead zirconate titanate thin films with interdigitated electrodes

Journal of the European Ceramic Society(2023)

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摘要
This work compares the fatigue behavior of fully transparent lead zirconate titanate films with a composition at the morphotropic phase boundary on fused silica glass or sapphire, respectively, fitted with coplanar interdigitated top electrodes and no bottom electrodes to that of the same systems in a traditional metal–insulator–metal parallel plate capacitor geometry. While the polarization hysteresis in the latter geometry decreases rapidly during bipolar electrical cycling, systems with coplanar electrodes show no notable fatigue up to 107 cycles. The difference is explained based on the columnar microstructure of the films: for coplanar electrode geometries, the grain boundaries of the columnar structure act as trapping sites for oxygen vacancies, preventing the build-up of agglomerates that cause fatigue by domain wall pinning.
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关键词
Chemical solution deposition,PZT,Interdigitated electrodes,Fatigue,Columnar microstructure
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