Correlation between Access Polarization and High Endurance (similar to 10(12) cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

Endurance similar to 10(12) cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (t(p)). The correlation between switching polarization (Delta P) and fatigue behavior of high endurance is discussed. For long t(p) (= 1 mu s), AFE exhibits excellent endurance with > 10(10) cycles as compared with FE similar to 10(9) cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 10(11) cycling is observed for FE with t(p)=20ns.