Forked-contact and dynamically-doped nanosheets to enhance Si and 2D-material devices at the limit of scaling

Solid-State Electronics(2023)

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摘要
•A novel Forked-Contact, Dynamically-Doped Multigate Nanosheet transistor that enables sub-30-nm pitch scaling is proposed.•DFT-NEGF fundamentals and cell layout extrinsics demonstrate a 10 nm scaling boost both for Si and 2D material devices.•The material-specific fundamental gate-length limit for transistor scaling for Si and 2D materials is also assessed here.
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关键词
CMOS,CGP scaling,Si,2D materials,DFT-NEGF,Ab-initio,Nanosheet,Dynamic-doping
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