A novel coaxial focus position detection technique based on differential modulation evaluation for laser direct photolithography

Chenhaolei Han,Yan Tang,Xiaolong Cheng,Haifeng Sun,Jinhua Feng,Song Hu

Optics and Lasers in Engineering（2023）

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摘要

•A novel coaxial focus position detection technique based on differential modulation evaluation is proposed for improving focus position detection accuracy.•The proposed method can eliminate the influence of different reflectivity of the surface of the substrate.•Through experimentally verified, the focus detection accuracy is better than 5nm in the case of an objective lens with a numerical aperture of 0.9.

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关键词

Coaxial focus position detection,Differential modulation evaluation,Reflectance disturbance resistibility

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