Enhancement of mechanical, thermal and optical properties of TiO2 thin films using glancing angle deposition technique

RF Magnetron sputtering has been used to compare the mechanical, thermal, and electrical characteristics of titanium oxide (TiO2) thin films. The Glancing Angle Deposition methods (GLAD) have been implemented during the deposition of a thin film of TiO2. After annealing thin films on an ITO substrate, X-RD indicates the anatase phase, and SEM investigation confirms the deposition of TiO2 thin films and their surface morphology. The mechanical, thermal, and electrical properties of TiO2 thin films prepared by magnetron sputtering with RF supply have been investigated. Using GLAD deposition, a clear change in thermal conductivity and elastic properties has been observed. Experimental specific heat of thin film deposited at zero angles follows Debye and Einstein equation, while with GLAD deposition specific heat shows an increase in deviation as the angle of deposition increases. With a rise in inclination angle, a clear change in transmission spectra towards a higher wavelength has been observed. Following heat treatment, the optical transmission spectra of thin films with GLAD deposition confirm the formation of fringes and have been shifted towards the higher wavelength side to increase in inclination. Hence, using GLAD deposition on TiO2 plays an important role to change thermal conductivity, specific heat, elastic and electronic properties and which leads to many applications in thermal solar collectors, thermal sensors, thermo-optical switching, and sensing-based industries.