300-GHz Back-Radiation On-Chip-Antenna Measurement with Electromagnetic-Wave-Absorption Sheet

Sangyeop Lee,Kosuke Katayama,Kyoya Takano,Masao Fujita,Masayuki Toyoda,Shinsuke Hara,Issei Watanabe,Akifumi Kasamatsu,Shuhei Amakawa,Takeshi Yoshida,Minoru Fujishima

2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS)（2022）

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摘要

A method is demonstrated to improve measurement accuracy for a back-radiation (inward-directed-radiation) on-chip antenna using a 300-GHz electromagnetic-wave absorption sheet. Electromagnetic-wave reflection owing to the material beneath a chip substrate occurs during the on-wafer measurement, leading to the input-impedance variance of that antenna at the feeding port, therefore, should be reduced using the method.

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关键词

Electromagnetic-wave (EM-wave),absorber,on-chip antenna,terahertz,300-GHz

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