A combinatorial study of SiGeAsTe thin films for application as an Ovonic threshold switch selector

Wouter Devulder,Daniele Garbin,Sergiu Clima,Gabriele Luca Donadio,Andrea Fantini,Bogdan Govoreanu,Christophe Detavernier, Larry Chen, Michael Miller,Ludovic Goux,Sven Van Elshocht,Johan Swerts,Romain Delhougne,Gouri Sankar Kar

Thin Solid Films（2022）

引用 5|浏览19

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摘要

•Combinatorial deposition and characterization of a large SiGeAsTe thin film library.•Identification of a back-end-of-line compatible stack.•Ovonic threshold switch selector with an endurance over 108 cycles.

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关键词

Chalcogenides,Thermal stability,In situ X-ray diffraction,Ovonic threshold switching,Selectors

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