A combinatorial study of SiGeAsTe thin films for application as an Ovonic threshold switch selector

Thin Solid Films(2022)

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摘要
•Combinatorial deposition and characterization of a large SiGeAsTe thin film library.•Identification of a back-end-of-line compatible stack.•Ovonic threshold switch selector with an endurance over 108 cycles.
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关键词
Chalcogenides,Thermal stability,In situ X-ray diffraction,Ovonic threshold switching,Selectors
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