300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Luka Kljucar,Quentin Smets,Michiel Setten,Jerome Mitard, Atillio Belmonte,Harold Dekkers,Lieve Teugels, Ming Mao,Harinarayanan Puliyalil, Jose Ignaciodel Agua Borniquel,Romain Delhougne, Gouri Sankar Kar,Zsolt Tokei

Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials(2020)

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igzo nfets
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