Low-loss Germanium-on-Silicon Waveguides and Ring Resonators for the Mid-Wave Infrared

Conference on Lasers and Electro-Optics(2022)

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摘要
Low-loss germanium-on-silicon waveguides for 4.6 µm light are demonstrated in both rectangular (loss= 1.7 dB/cm) and rib (0.6 dB/cm) waveguide geometries. High-Q microring resonator filters (Q= 93,400) are also demonstrated.
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low-loss germanium-on-silicon waveguides,ring resonators,high-Q microring resonator filters
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