A Novel Method for Characterization of Ultralow Viscosity NCF Layers Using TCB for 3D Assembly

Abstract For die-to-wafer (D2W) stacking of high-density interconnects and fine-pitch microbumps, underfill serves to fill the spaces in-between microbumps for protection and reliability. Among the different types of underfill, nonconductive film (NCF) has the advantages of fillet and volume control. However, one of the challenges is the solder joint wetting. An NCF must have good embedded-flux activation to mitigate Cu UBM pad oxidation due to the repeated TCB cycles that accelerate oxidation on neighboring dice. The flux in the NCF also helps in wetting the solder bumps. To realize efficient solder wetting, one must also understand the NCF deformation quality, which is a function of its viscosity. This parameter has direct impact on the deformation of solder bumps. High-viscosity NCF would be difficult to deform, thus preventing solder contact to pad during TCB reflow temperature. High bond force is required and could lead to reduced alignment accuracy. For a low viscous NCF, it requires low bond force. Solder joint wetting is a challenge with excessive squeezeout due to fast and instantaneous deformation. We seek to demonstrate in this article a creative methodology for NCF material characterization, considering the factors of NCF viscosity, deformation, and solder squeezeout. We use TCB tool position-tracking data to define the deformation curve of the NCF as a function of temperature and time at very fast profile of TCB. We use the NCF viscosity curve as reference in relation to the actual deformation, and predict dynamic deformation in three different configurations. Deformation test configurations were performed on chips with and without microbumps bonded with a rigid flat glass surface and with a bottom Cu UBM pad. The experiments were performed with different heating ramp rates at target above Sn reflow of ~250°C interface temperature. As validation, we applied the optimized TCB process (force, temperature, and ramp rate) on a test vehicle with 20 and 40 μm pitch daisy chains and obtained very good connectivity with good joint and IMC formation.