Integrated optomechanical sensing for semiconductor metrology

A. Fiore,F. Galeotti, T. Liu,M. Petruzzella, I. Seršić Vollenbroek, G.G. Lindgren, F. Pagliano,F.W.M. van Otten,P.J. van Veldhoven, V. Pogoretskiy,Y. Jiao, A. Mohtashami,H. Sadeghian,R.W. van der Heijden

Conference on Lasers and Electro-Optics（2021）

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摘要

In this talk we will present recent process on the integration of nano-opto-electro-mechanical sensors with photonic circuits and optical read-out, showing a route towards fully-integrated optical sensing.

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关键词

integrated optomechanical sensing,semiconductor metrology,nanoopto-electro-mechanical sensors,photonic circuits,fully-integrated optical sensing,optical read-out

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