X-ray radiation damage effects on double-SOI pixel detectors for the future astronomical satellite FORCE

We have been developing the monolithic active pixel detector XRPIX onboard the future x-ray astronomical satellite FORCE. XRPIX is composed of complementary metal-oxide-semiconductor pixel circuits, SiO2 insulator, and Si sensor by utilizing the silicon-on-insulator (SOI) technology. When the semiconductor detector is operated in orbit, it suffers from radiation damage due to x-rays emitted from celestial objects as well as cosmic rays. From previous studies, positive charges trapped in the SiO2 insulator are known to cause degradation of the detector performance. To improve the radiation hardness, we developed XRPIX equipped with a double-SOI (D-SOI) structure, introducing an additional silicon layer in the SiO2 insulator. This structure is aimed at compensating for the effect of the trapped positive charges. Although the radiation hardness of the D-SOI detectors to cosmic rays has been evaluated, the radiation effect due to x-ray irradiation has not been evaluated. Thus, we then conduct an x-ray irradiation experiment using an x-ray generator with a total dose of 10 krad at the SiO2 insulator, equivalent to 7 years in orbit. As a result of this experiment, the energy resolution in full-width half maximum for the 5.9 keV x-ray degrades by 17.8% +/- 2.8% and the dark current increases by 89% +/- 13%. We also investigate the physical mechanism of the increase in the dark current due to x-ray irradiation using technology computer-aided design simulation. It is found that the increase in the dark current can be explained by the increase in the interface state density at the Si/SiO2 interface. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License.