MASKLESS AND DIRECT WRITE PREPARATION METHOD OF 3D PAPER-BASED MICROFLUIDIC DEVICE BASED ON ATMOSPHERIC PRESSURE LOW TEMPERATURE PLASMA JET

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)(2022)

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摘要
This paper reports a method of fabricating the fabricating the 3D paper-based microfluidic device using atmospheric pressure low temperature plasma jet, which can achieve direct writing and maskless machining by programming the motion path of the three-axis moving platform. The depth and width of the microchannel processed by this method can be adjusted and two liquid channels and through holes can be prepared on a single layer filter paper to realize a three-dimensional paper-based device. Compared with stacking and folding, this method can ensure the alignment accuracy between functional layers of 3D microfluidic devices and reduce the difficulty and time of preparation
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关键词
Atmospheric pressure plasma jet, direct writing, all-dry, 3D microfluidic device
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