Effects of Zr/(Zr plus Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1-xN Films

TixZr1-xN hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited TixZr1-xN films displayed similar surface and fracture cross-section morphologies and thicknesses. The effects of Zr/(Zr+Ti) molar ratio on the phase composition, preferred growth orientation, and hardness of the films were discussed. The results showed that the as-deposited films had a face-centered cubic structure and exhibited the typical characteristics of substitutional solid solutions. The lattice constant of the films increased monotonically with increasing Zr/(Zr+Ti) molar ratio. Two preferred growth orientations, corresponding to the two hardness peak values, occurred symmetrically at Zr/Ti molar ratios of 40:60 and 60:40. An inflection point with a small reduction in hardness was observed at the Zr/Ti molar ratio of 50:50.