Ozone sensing study of sprayed β-In2S3 thin films

•Sprayed In2S3 films show good sensitivity to ozone.•Optimal ozone sensing temperature is 160 °C.•Response and recovery times are 147 s/414 s for 40 ppb ozone at 160 °C.•Response increases from 1.5 to 5 by increasing ozone concentration from 40 ppb to 400 ppb at 160 °C.•NO2 and O3 gases give better response at lower temperature than VOCs.