Heterogeneous integration of semiconductor nanowires in 2D and 3D nanophotonic systems

Physics and Simulation of Optoelectronic Devices XXIX(2021)

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摘要
Semiconductor Nanowires (NWs) have revolutionized photonics by providing minimal footprint optoelectronic devices and coherent light sources. However, given their nanoscale dimensions, their integration with nanophotonic systems is a significant challenge. To overcome this issue, we have developed a hybrid nanofabrication technique, known as nanoscale transfer-printing, permitting the accurate integration of individually-selected NWs at target positions onto desired surfaces. Examples of nanophotonic systems enabled by our technique include 1D/2D NW laser arrays and on-chip waveguide-coupled NW laser systems. We have also recently demonstrated a nanophotonic circuit for THz signal detection formed by a 3D semiconductor NW network coupled with a metallic antenna structure.
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