Heterogeneous integration of semiconductor nanowires in 2D and 3D nanophotonic systems
Physics and Simulation of Optoelectronic Devices XXIX(2021)
摘要
Semiconductor Nanowires (NWs) have revolutionized photonics by providing minimal footprint optoelectronic devices and coherent light sources. However, given their nanoscale dimensions, their integration with nanophotonic systems is a significant challenge. To overcome this issue, we have developed a hybrid nanofabrication technique, known as nanoscale transfer-printing, permitting the accurate integration of individually-selected NWs at target positions onto desired surfaces. Examples of nanophotonic systems enabled by our technique include 1D/2D NW laser arrays and on-chip waveguide-coupled NW laser systems. We have also recently demonstrated a nanophotonic circuit for THz signal detection formed by a 3D semiconductor NW network coupled with a metallic antenna structure.
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