Solid-source doping by using phosphosilicate glass into p-type bulk Si (100) substrate: Role of the capping SiO2 barrierYoshiaki Kikuchi,Antony Peter, Bartlomiej Jan Pawlak,An De Keersgieter,Pierre Eyben,Naoto Horiguchi,Anda MocutaJournal of Vacuum Science & Technology B（2018）引用 0|浏览3暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
