A 100Gbps/lambda-capable silicon photonics platform

Roman Bruck,Yannick De Koninck,Kam-Yan Hon,Peng Sun,Marc Savanier,Subal Sahni,Gianlorenzo Masini,Scott Denton, Laurent Planchon,Thierry Pinguet, Nathaniel Rudnick, Gene Armijo,Joseph Balardeta,Brian Chase, Yuemeng Chi,Anders Dahl, Mehmet Eker, Sama Fathpour, Dennis Foltz, Steve Hovey,Steven Jackson, Wei Li, Yee Liang,Michael Mack, Gary McGee,Simon Pang,Mark Peterson, Kevin Roberson, Jeff Schramm, Chang Sohn, Kirk Stechschulte, George Vastola, Shawn Wang, Gary Wong, Kosei Yokoyama,Shuhuan Yu, Richard Zhou,Attila Mekis,Peter De Dobbelaere

Smart Photonic and Optoelectronic Integrated Circuits XX（2018）

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摘要

Luxtera and TSMC have jointly developed a new generation 100Gbps/λ-capable silicon photonics platform in a commercial 300 mm CMOS line. We present process details and the performance of the photonic device library.

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