A Scalable Deep Learning-Based Approach for Anomaly Detection in Semiconductor Manufacturing
2021 Winter Simulation Conference (WSC)(2021)
摘要
The diffusion of the Industry 4.0 paradigm lead to the creation and collection of huge manufacturing datasets; such datasets contain for example measurements coming from physical sensors located in different equipment or even in different productive manufacturing organizations. Such large and heterogeneous datasets represent a challenge when aiming for developing data-driven approaches like Anomal...
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