A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

Hui Jiang, Yang Liu,Luke Middelburg,Brahim El Mansouri,Stoyan Nihtianov

2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)（2021）

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摘要

This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the o...

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关键词

Integrated circuits,Micromechanical devices,Integrated circuit technology,Inertial sensors,Digital-analog conversion,Energy resolution,Capacitance

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