Preparation Of (511)-Oriented Bati2o5 Thick Film On Pt/Mgo(111) Substrate By Laser Chemical Vapor Deposition

A BaTi2O5 film was deposited on a Pt-coated MgO(111) single-crystal substrate by laser chemical vapor deposition. The crystal structure, morphologies, and dielectric properties of the film were investigated. A single-phase BaTi2O5 thick film with (511) orientation was obtained at a high deposition rate of 65.1 pm/h and consisted of rhombic grains with a columnar cross section. The (511)-oriented BaTi2O5 thick film had a dielectric constant of 75 and a dielectric loss of 0.015 at 300 K and 1 MHz, and its Curie temperature (T-c) was approximately 720 K, indicating its potential application in capacitors.