Optical Microstructures For High Performance Inertial Sensors

2019 IEEE RESEARCH AND APPLICATIONS OF PHOTONICS IN DEFENSE CONFERENCE (RAPID)(2019)

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摘要
We report progress on precision optical microstructures such as a postage stamp-sized optics table aimed at miniaturization and cost reduction of navigation-grade gyroscopes. Other chip-scale developments include an optical waveguide-based laser gyroscope, and resonant opto-mechanical structures with optical readout for gun-hard gyroscopes and accelerometers, respectively.
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关键词
silicon optical bench, stimulated Brillouin scattering, optomechanical resonator
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