Mechanism Of Nanohills Growth In Si(1-X)Ge(X)/Si Structure By Laser Radiation

Artur Medvid,Pavels Onufrijevs,Igor Dmitruk,Iryna Pundyk,Klara Lyutovich,Michael Oehme,Erich Kasper

INTERNATIONAL CONFERENCE ON RADIATION INTERACTION WITH MATERIALS AND ITS USE IN TECHNOLOGIES 2008（2008）

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摘要

This work is to study the mechanism of nanohills growth in Si(1-x)Ge(x)/Si structure by laser radiation. P-type Si (001), i-type Ge crystals and Si(0.7)Ge(0.3)/Si heteroepitaxial structure were irradiated by nanosecond Nd:YAG laser pulses.

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关键词

Si(1-x)Ge(x)/Si,Ge,SiO(2)/Si,nanostructures,Thermogradient effect

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