Ultra-Thinned Individual SOI Die ACF FC Bonded on Rigid and Flex PCB

2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)(2021)

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摘要
We have developed a straightforward die-level thinning process suitable for Silicon-On-Insulator (SOI) dies. The process has been demonstrated on SOI CMOS die assembled on rigid and flexible PCBs using previously-developed anisotropic conductive adhesive flip-chip method. Unlike standard wafer-level thinning processes, in the demonstrated process the full thickness SOI die is directly mounted on P...
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关键词
Performance evaluation,Optical microscopy,Silicon-on-insulator,Silicon,Surface roughness,Rough surfaces,Flip-chip devices
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