Investigation on the Dynamic Process of Gas Breakdown Across Microgaps Under Pulsed Voltage
2018 IEEE International Conference on Plasma Science (ICOPS)(2018)
摘要
The electrical discharge and insulation performance at microscale have attracted much attention as the physical dimensions of electron devices are aggressively shrinking down. Hence, to prevent unwanted breakdown or utilize for producing microplasma, both require a better understanding of the physical process of breakdown across micro gaps, which cannot be explained by the classical Paschen law1. ...
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