Joule heating investigation for advanced interconnect schemes with airgaps

In this paper, we present a modeling study to investigate the self-heating effect on advanced metallization schemes with airgaps using an experimentally calibrated finite element model. We compared N3 technology node with N2 integrated with airgaps. Despite the higher metal density of the fully dense Ru lines (50%) at the lower metal levels in the N2 structure with airgaps, the N2 stack is more su...