Beamforming with AlN-based bimorph piezoelectric micromachined ultrasonic transducers

In this paper, we demonstrate a multi-membranes piezoelectric micromachined ultrasonic transducer (pMUT) device devoted to air-borne pulse-echo measurement with an angular resolution of 18 degrees. The setup includes a one-dimensional pMUT array of 5 bimorph AlN-based membranes working at 113.6 kHz for reception and a single pMUT membrane for emission. Pulse-echo measurement are achieved on an aco...