Low Hysteresis MoS 2 -FET Enabled by CVD-Grown h-BN Encapsulation
2021 Device Research Conference (DRC)(2021)
摘要
Molybdenum disulfide (MoS 2 ) is a widely studied two-dimensional (2D) semiconductor with high potential as channel material in field effect transistors (FET) [1] . A major challenge for MoS 2 -based FETs is low hysteresis operation [2] . Al 2 O 3 is a common encapsulation layer or gate dielectric, even though it causes an n-doping effect on MoS 2 -FETs after their encapsulation [3] , [4] . Here, ...
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