A Systematic Identification Approach For Biaxial Piezoelectric Stage With Coupled Duhem-Type Hysteresis

PurposeThe problem of parameter identification for biaxial piezoelectric stages is still a challenging task because of the existing hysteresis, dynamics and cross-axis coupling. This study aims to find an accurate and systematic approach to tackle this problem.Design/methodology/approachFirst, a dual-input and dual-output (DIDO) model with Duhem-type hysteresis is proposed to depict the dynamic behavior of the biaxial piezoelectric stage. Then, a systematic identification approach based on a modified differential evolution (DE) algorithm is proposed to identify the unknown parameters of the Duhem-type DIDO model for a biaxial piezostage. The randomness and parallelism of the modified DE algorithm guarantee its high efficiency.FindingsThe experimental results show that the characteristics of the biaxial piezoelectric stage can be identified with adequate accuracy based on the input-output data, and the peak-valley errors account for 2.8% of the full range in the X direction and 1.5% in the Y direction. The attained results validated the correctness and effectiveness of the presented identification method.Originality/valueThe classical DE algorithm has many adjustment parameters, which increases the inconvenience and difficulty of using in practice. The parameter identification of Duhem-type DIDO piezoelectric model is rarely studied in detail and its successful application based on DE algorithm on a biaxial piezostage is hitherto unexplored. To close this gap, this work proposed a modified DE-based systematic identification approach. It not only can identify this complicated model with more parameters, but also has little tuning parameters and thus is easy to use.