Spectroscopic Ellipsometry Of Amorphous Se Superlattices

JOURNAL OF PHYSICS D-APPLIED PHYSICS(2021)

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摘要
Superlattice structures have a variety of electrical and optical properties that allow for interesting applications like quantum cascade lasers and ultrasensitive photo-detectors. However, such structures require high-tech fabrication methods like molecular beam epitaxy, and this technology barrier means that these promising devices are not in widespread use. Using the simple method of rotational evaporation, we fabricated films with alternating multi-nanolayers of amorphous selenium (Se) and arsenic selenide (As2Se3). We investigated the optical properties of the individual materials, and the resulting multi-layer structure using spectroscopic ellipsometry. The results were modeled using Cody-Lorentz oscillators to obtain the refractive index (n) and extinction coefficient (k). The models showed the optical band gaps of Se and As2Se3 to be 1.97 and 1.69 eV, respectively. The absorption coefficient (alpha) of the multi-layer structure showed a series of five 'steps' in energy at 1.72, 1.82, 1.89, 1.97, and 2.04 eV. These are confirmed to stem from the transitions between confined quantum well levels due to the superlattice structure. In this way, the optical measurement using spectroscopic ellipsometry confirms the possibility of fabricating good quality nanostructutres using amorphous materials and rotational evaporation.
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关键词
spectroscopic ellipsometry, superlattices, amorphous, nanostructures
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