High Speed Mach Zehnder Modulator With Low Series Resistance Phase Shifter Loaded In Traveling Wave Electrode
2020 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC 2020)(2020)
摘要
This research presents the design and characterization of the traveling wave Mach Zehnder modulator loaded L-shaped PN junction phase shifter at 72.8 Gbps data-rate. We propose a new structure of phase shifter with low series resistance meanwhile maintaining the FOM with low V pi L (0.9 V-cm) and optical absorption.
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关键词
silicon photonics, modulator, optical interconnect
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