Low-Loss, Low-Crosstalk Silicon Nitirde Array Waveguide Grating Using Multimode Waveguide At 850nm

ieee photonics conference（2020）

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摘要

We investigated silicon nitride(SixNy) arrayed waveguide grating (AWG) with multimode arrayed waveguide at 850nm wavelength to reduce phase error due to the sidewall roughness of the waveguide. The fabricated 8-channel SixNy AWG shows low crosstalk of -30dB and low loss of 0.5dB.

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关键词

arrayed waveguide grating, silicon nitride

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