IGZO Integration Scheme For Enabling IGZO nFETs
L. Kljucar, J. Mitard, N. Rassoul,H. Dekkers,S. Steudel, J.I.delAgua Borniquel, B.De Wachter,L. Teugels, D. Tsvetanova, K. Devriendt, I. Grisin, G. Boccardi, H. Hody, M. Nag,L.Di Piazza, C.J. Wilson,G.S. Kar, Z. Tokei, J. Ramalingam, Y. Cao, D.L. Diehl The Japan Society of Applied Physics（2019）
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