Color Difference Detection of Polysilicon Wafers using Optimized Support Vector Machine by Magnetic Bacteria Optimization Algorithm with Elitist Strategy

A support vector machine (SVM) is an important method in the detection and classification of the color difference on a polysilicon wafer. However, the accuracy of a SVM is affected by its feature vector and parameters. Owing to the complex color information and random texture features on the wafer surface, the feature design is extremely complicated. Meanwhile, a SVM optimized using a popular inte...